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真空溅射镀膜旋转靶材
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靶材材料一览
旋转靶材
Material: |
Purity: |
Max.Thickness: |
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Ag |
|
9/13 dog bone |
sprayed |
Cr |
>2N |
7 mm cylindrical |
sprayed,finished |
NiCr |
97,5% |
|
sprayed,finished |
SiAl |
3N |
9/13 dog bone |
sprayed,finished |
Sn |
3N |
9/13 dog bone |
finished |
TiOx |
3N |
5/7 dog bone |
sprayed,finished |
Zn |
3N |
9/13 dog bone |
finished |
ZnAl |
3N |
9/13 dog bone |
finished |
ZnSn |
>2N3 |
15 mm cylindrical |
finished |
ZnO doped |
2N7 |
20 mm cylindrical |
finished |
平面靶材
金属可纯度可达5N
Ag
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Cr |
Mo |
Pt |
Ta |
Zn |
Al |
In |
Ni |
Si |
Ti |
Zr |
Au |
Mg |
Pd |
Sn |
W |
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金属纯度可达2N8（2种成分）
AlCu |
CrAl |
FeNi |
NiTi |
SnBi |
TiPd |
AlSi |
CrNi |
InSn |
NiV |
SnCu |
ZnAl |
AlMg |
CrSi |
NiAl |
SiAl |
SnPb |
ZnGa |
BiSb |
CuNi |
NiCr |
SiCr |
SnZn |
ZrSi |
BiZn |
CuZn |
NiFe |
SnAg |
TiAl |
ZrY |
合金程度可达2N8（3种成分）
AlMgCu |
CuNiSn |
SnAgCu |
ZnSnAl |
BiSnMn |
CuZnMn |
X6CrNiTi18.10 |
ZnSnSb |
陶瓷材料纯度可达3N
溅射靶材一览
  
 
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